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Journal of vacuum science and technology / American Vacuum Society

資料種別:
雑誌
出版情報:
New York : American Institute of Physics
巻次年月次:
Vol. 1, no. 1 (1964)-v. 21, no. 4 (1982)
継続後誌:
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <AA10635106>
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society <AA10635514>
ISSN:
00225355
書誌ID:
AA00708677
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