所蔵情報QRコード
Journal of vacuum science and technology / American Vacuum Society
- 資料種別:
- 雑誌
- 出版情報:
- New York : American Institute of Physics
- 巻次年月次:
- Vol. 1, no. 1 (1964)-v. 21, no. 4 (1982)
- 継続後誌:
- Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <AA10635106>
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society <AA10635514> - ISSN:
- 00225355
- 書誌ID:
- AA00708677
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