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図書
図書
1. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al. ; published by SPIE--The International Society for Optical Engineering]
出版情報: Bellingham, Wash. : SPIE, c2002  xiii, 256 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4764
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2.

図書
図書
2. 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al.] ; cooperating oganizations, SEMI Europe ... [et al.] ; published by SPIE--The International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2003  li, 264 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5148
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図書
図書
3. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c2004  xxiv, 210 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5504
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4.

図書
図書
4. EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.]
出版情報: Bellingham, Wash., : SPIE, c2006  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6281
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5.

図書
図書
5. EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)
出版情報: Bellingham, Wash., : SPIE , Berlin, Germany : VDE Verlag GmbH, c2005  xxx, 302 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5835
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図書
図書
6. EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany
Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.]
出版情報: Bellingham, Wash., : SPIE, c2008  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6792
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7.

図書
図書
7. EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6533
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