Optical/laser microlithography : 2-4 March 1988, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Optical/laser microlithography : 2-4 March 1988, Santa Clara, California / Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1988

形態:

viii, 486 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 922 <BA0022700X>

著者名:

ISBN:

9780892529575 [0892529571]

書誌ID:

BA07692256

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographies and index
主題:	Lasers--Industrial applications--Congresses; Microlithography--Congresses; Optical instruments--Congresses
言語:	英語

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