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1.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
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2.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
所蔵情報: loading…
3.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
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4.

図書

図書
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash., USA : SPIE, c1995  vii, 450 p. ; 28 cm.; jf08 12-18-95 to SL
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2437
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5.

図書

図書
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; cosponsored by Japan Chapter of SPIE ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1995  xi, 554 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2512
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6.

図書

図書
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  xi, 982 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3051
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7.

図書

図書
Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6607
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8.

図書

図書
Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6607
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9.

図書

図書
Naoaki Aizaki, editor ; sponsored by Photomask Japan, BACUS, SPIE--The International Society for Optical Engineering ; supporting societies, The Japan Society of Applied Physics ... [et al.] ; published by SPIE--The International Society for Optical Engineering
出版情報: Bellingham, Washington : SPIE, c1998  xiii, 616 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3412
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10.

図書

図書
Hiroaki [i.e. Hiraoki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan
出版情報: Bellingham, Wash., USA : SPIE, c2000  xv, 750 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4066
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