Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

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Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman

Format:

Book

Published:

Pittsburgh, Pa. : Materials Research Society, c1986

Description:

xvii, 535 p. ; 24 cm

Series:

Materials Research Society symposium proceedings ; v. 71 <BA00013775>

Authors:

ISBN:

9780931837371 [0931837375]

NCID:

BA03515168

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Bibliography Details

Note:	Includes bibliographies and indexes
Subject:	Microelectronics--Materials--Congresses
Language:	English

Tokyo Tech Book Review

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