Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

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Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors, C.Y. Wong, C.V. Thompson, K.N. Tu

Format:

Book

Published:

Pittsburgh, Pa. : Materials Research Society, c1988

Description:

xi, 369 p. ; 24 cm

Series:

Materials Research Society symposium proceedings ; v. 106 <BA00013775>

Authors:

ISBN:

9780931837746 [093183774X]

NCID:

BA0688725X

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Bibliography Details

Note:	"This volume represents the Proceedings of the Symposium on Polysilicon Films and Interfaces"--P. xi Includes bibliographies and indexes
Subject:	Integrated circuits--Materials--Congresses; Silicon--Electric properties--Congresses

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