Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo ... [et al.] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions

Format:

Book

Published:

Pennington, NJ (10 South Main St., Pennington 08534-2896) : Electrochemical Society, c1990

Description:

x, 399 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 90-9 <BA01323290>

Authors:

NCID:

BA11868447

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Bibliography Details

Note:	"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii Includes bibliographical references and indexes
Subject:	Semiconductor wafers--Cleaning--Congresses
Language:	English

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