Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology Divisions

Format:

Book

Published:

Pennington, NJ (10 South Main St., Pennington 08534-2896) : Electrochemical Society, c1992

Description:

xi, 502 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 92-12 <BA01323290>

Authors:

ISBN:

9781566770125 [1566770122]

NCID:

BA18281537

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Bibliography Details

Note:	"Held at the Electrochemical Society Fall Meeting in Phoenix, Arizona, October 14-18, 1992"--P. iii Includes bibliographical references and indexes
Subject:	Semiconductor wafers--Cleaning--Congresses
Language:	English

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