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Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [et. al.]

Format:
Book
Published:
Pittsburgh, Pa. : Materials Research Society, c1992
Description:
xiii, 529 p. ; 24 cm
Series:
Materials Research Society symposium proceedings ; v. 259 <BA00013775>
Authors:
Nemanich, R. J. (Robert J.) <DA02188561>  
ISBN:
9781558991545 [1558991549]
NCID:
BA19373448
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