Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

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Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I / edited by Dennis N. Schmidt, assistant editors, David Reedy, Alex Schwarz ; Electronics and Dielectric Science and Technology Divisions

Format:

Book

Published:

Pennington, N.J. : Electrochemical Society, c1992

Description:

x, 501 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 92-21 <BA01323290>

Authors:

ISBN:

9781566770224 [156677022X]

NCID:

BA19556991

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Bibliography Details

Note:	Includes bibliographical references and index
Language:	English

Tokyo Tech Book Review

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