Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

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Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing / edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division

Format:

Book

Published:

Pennington, NJ : Electrochemical Society, c1993

Description:

ix, 283 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 93-15 <BA01323290>

Authors:

ISBN:

9781566770590 [1566770599]

NCID:

BA21147496

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Bibliography Details

Note:	Symposium held in Grenoble, France, on September 17th, 1993 Includes bibliographical references and indexes
Language:	English

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