Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey / Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- Format:
- Book
- Published:
- Bellingham, Wash. : SPIE, c1992
- Description:
- ix, 308 p. ; 28 cm
- Series:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1678 <BA0022700X>
- Authors:
- ISBN:
- 9780819408396 [0819408395]
- NCID:
- BA2262849X
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