Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by J. Ruzyllo ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

Format:

Book

Published:

Pennington, NJ : The Electrochemical Society, c1994

Description:

xiii, 604 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 94-7 <BA01323290>

Authors:

ISBN:

9781566770385 [1566770386]

NCID:

BA23030456

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Bibliography Details

Note:	Includes bibliographies and index "held during the Electrochemical Society Fall Meeting in New Orleans, Louisiana, October 15-20, 1993"
Language:	English

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