Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions

Format:

Book

Published:

Pennington, NJ : Electrochemical Society, c1994

Description:

xiii, 625 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 94-16 <BA01323290>

Authors:

ISBN:

9781566770484 [1566770483]

NCID:

BA23818650

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Bibliography Details

Note:	Includes bibliographical references
Subject:	Electric insulators and insulation--Thin films--Congresses; Silicon dioxide--Congresses; Silicon nitride--Congresses; Thin film devices--Congresses
Language:	English

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