Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California / C. Grant Willson, chairman/editor
- Format:
- Book
- Published:
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1986
- Description:
- vi, 346 p. ; 28 cm
- Series:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 631 <BA0022700X>
- Authors:
- ISBN:
- 9780892526666 [0892526661] (pbk.)
- NCID:
- BA24022715
Similar Items:
S.P.I.E.-- International Society for Optical Engineering | |
2
![]() SPIE--the International Society for Optical Engineering | |
International Society for Optical Engineering | |