Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA | 東京工業大学附属図書館蔵書検索

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Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA / editors, Michael Liehr ... [et al.]

Format:: Book
Published:: Pittsburgh, PA : Materials Research Society, 1995
Description:: xiii, 411 p. ; 24 cm
Series:: Materials Research Society symposium proceedings ; vol. 386 <BA00013775>
Authors:: Liehr, Michael <DA09545725>
ISBN:: 9781558992894 [1558992898]
NCID:: BA26512001

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Note:	Includes bibliographical references and index
Subject:	Integrated circuits--Design and construction--Congresses; Manufacturing processes--Cleaning--Congresses

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