Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA / editors, Michael Liehr ... [et al.]
- Format:
- Book
- Published:
- Pittsburgh, PA : Materials Research Society, 1995
- Description:
- xiii, 411 p. ; 24 cm
- Series:
- Materials Research Society symposium proceedings ; vol. 386 <BA00013775>
- Authors:
- ISBN:
- 9781558992894 [1558992898]
- NCID:
- BA26512001
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