Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / editors M. Jamal Deen ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society]

Format:

Book

Published:

Pennington, New Jersey : Electrochemical Society, c1997

Description:

xiii, 588 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 97-10 <BA01323290>

Authors:

ISBN:

9781566771375 [1566771374]

NCID:

BA43128280

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Bibliography Details

Other titles:	Silicon nitride and silicon dioxide thin insulating films
Note:	Includes bibliographic references and indexes
Subject:	Electric insulators and insulation--Thin films--Congresses; Silicon dioxide--Congresses; Silicon nitride--Congresses; Thin film devices--Congresses
Language:	English

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