Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II / editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society]

Format:

Book

Published:

Pennington, NJ : Electrochemical Society, c1997

Description:

x, 518 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 97-22 <BA01323290>

Authors:

Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing <DA12237561>

Kolbesen, Bernd O. <DA07746930>

Electrochemical Society. Electronics Division <DA0357072X>

Symposium on Silicon Cleaning Technology <DA12237572>

Electrochemical Society. Meeting <DA03398898>

International Society of Electrochemistry. Meeting <DA12237583>

1 more

ISBN:

9781566771757 [1566771757]

NCID:

BA43133972

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Bibliography Details

Other titles:	Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Note:	"This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface Includes bibliographic references and indexes
Subject:	Contamination (Technology)--Congresses; Crystals--Defects--Congresses; Integrated circuits--Very large scale integration--Congresses
Language:	English

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