Optical microlithography XII : 17-19 March 1999, Santa Clara, California

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Optical microlithography XII : 17-19 March 1999, Santa Clara, California / Luc Van den hove chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; Cooperating organizations SEMI-Semiconductor Equipment and Materials International

Format:

Book

Published:

Bellingham, Wash., USA : SPIE, c1999

Description:

2 v. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3679 <BA0022700X>

Authors:

ISBN:

9780819431530 [0819431532] (: set)

NCID:

BA45980437

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Bibliography Details

Note:	Includes bibliographical references and index
Language:	English

Tokyo Tech Book Review

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