Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California

QR code for holdings

Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California / chair/editor Will Conley ; sponsored and published by SPIE--the International Society for Optical Engineering

Format:

Book

Published:

Bellingham, Wash., USA : SPIE, c1999

Description:

2v. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3678 <BA0022700X>

Authors:

ISBN:

9780819431523 [0819431524] (: set)

NCID:

BA45995999

Holding items in this series

Full Text

Holdings

Other editions or volumes

Bibliography Details

Other titles:	Advances in resist technology and processing XVI : microlithography 1999 : 15-17 March 1999, Santa Clara, California
Note:	Includes bibliographical references and index
Language:	English

Tokyo Tech Book Review

Similar Items:

1 Book Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Conley, Will SPIE	7 Book Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California (pbk.) Willson, C. G. (C. Grant), 1939-, Society of Photo-optical Instrumentation Engineers SPIE--the International Society for Optical Engineering
2 Book Optical microlithography XII : 17-19 March 1999, Santa Clara, California (: set ; pt. 1 ; pt. 2) Van den hove, Luc, Society of Photo-optical Instrumentation Engineers SPIE	8 Book Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California Advances in resist technology and processing, Tarascon-Auriol, R. G., Society of Photo-optical Instrumentation Engineers SPIE
3 Book Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California (pbk.) MacDonald, Scott A., Society of Photo-optical Instrumentation Engineers International Society for Optical Engineering	9 Book Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California (pbk.) Stover, Harry L., Society of Photo-optical Instrumentation Engineers S.P.I.E.-- International Society for Optical Engineering
4 Book Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California (pbk.) Bowden, M. J., 1943-, Society of Photo-optical Instrumentation Engineers SPIE	10 Book Optical microlithography II : technology for the 1980s : March 16-17, 1983, Santa Clara, California (pbk.) Stover, Harry L., Society of Photo-optical Instrumentation Engineers SPIE--the International Society for Optical Engineering
5 Book Advances in resist technology : March 12-13, 1984, Santa Clara, California (pbk.) Willson, C. G. (C. Grant), 1939-, Society of Photo-optical Instrumentation Engineers S.P.I.E.-- International Society for Optical Engineering	11 Book Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California ([v. 1] ; [v. 2]) Vladimirsky, Yuli, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials … SPIE
6 Book Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California (pbk.) Thompson, L. F., 1944-, International Society for Hybrid Microelectronics, Society of Photo-optical Instrumentation … SPIE--the International Society for Optical Engineering	12 Book Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Houlihan, Francis M. SPIE

1

2

3

4

5

6

7

8

9

10

11

12