Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

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Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium / editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

Format:

Book

Published:

Pennington, New Jersey : Electrochemical Society, c1999

Description:

xi, 284 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 99-6 <BA01323290>

Authors:

ISBN:

9781566772280 [1566772281]

NCID:

BA4897493X

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Bibliography Details

Note:	Includes bibliographic references and indexes
Subject:	Electric insulators and insulation--Thin films--Congresses; Silicon dioxide--Congresses; Silicon nitride--Congresses; Thin film devices--Congresses
Language:	English

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