Chemical Mechanical Planarization : proceedings of the International Symposium / editors, R.L. Opila ... [et al.]
- Format:
- Book
- Published:
- Pennington, N.J. : Electrochemical Society, c2001-2003
- Description:
- 3 v. ; 24 cm
- Series:
- Proceedings / [Electrochemical Society] ; v. 2000-26, 2002-1, 2003-21 <BA01323290>
- Authors:
- ISBN:
- 9781566772938 [1566772931] (IV)
9781566773294 [1566773296] (V)
9781566774048 [1566774047] (VI) - NCID:
- BA54501502
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