Chemical Mechanical Planarization : proceedings of the International Symposium

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Chemical Mechanical Planarization : proceedings of the International Symposium / editors, R.L. Opila ... [et al.]

Format:

Book

Published:

Pennington, N.J. : Electrochemical Society, c2001-2003

Description:

3 v. ; 24 cm

Series:

Proceedings / [Electrochemical Society] ; v. 2000-26, 2002-1, 2003-21 <BA01323290>

Authors:

ISBN:

9781566772938 [1566772931] (IV)
9781566773294 [1566773296] (V)
9781566774048 [1566774047] (VI)

NCID:

BA54501502

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Bibliography Details

Note:

"Dielectric Science and Technology and Electronics Divisions"--on IV T.p
IV:"... held at the 198th Meeting of The Electrochemical Society held in Phoenix, AZ from October 23 to October 25, 2000"--on p. iii
V:"... held at the 201st Meeting of the Electrochemical Society, in Philadelphia, Pennsylvania from May 12th to 17th, 2002" --on p. iii
VI:"... held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003" --on p. iii
IV: viii, 338 p.
V: vii, 274 p.
VI: vii, 358 p.
Includes bibliographical references and indexes

Language:

English

Tokyo Tech Book Review

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