Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

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Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia / Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

Format:

Book

Published:

Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c2001

Description:

ix, 392 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4591 <BA0022700X>

Authors:

ISBN:

9780819443212 [0819443212]

NCID:

BA5880187X

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Bibliography Details

Note:	Includes index
Language:	English

Tokyo Tech Book Review

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