Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia / Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

Format:

Book

Published:

Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c2001

Description:

xi, 538 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4592 <BA0022700X>

Authors:

ISBN:

9780819443229 [0819443220]

NCID:

BA58802522

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Bibliography Details

Note:	Includes index
Language:	English

Tokyo Tech Book Review

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