Electrochemical processing in ULSI fabrication III : proceedings of the international symposium

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Electrochemical processing in ULSI fabrication III : proceedings of the international symposium / editors, P. C. Andricacos ...[et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics

Format:

Book

Published:

Pennington, N.J. : Electrochemical Society, c2002

Description:

viii, 258 p. ; 24 cm

Series:

Proceedings / [Electrochemical Society] ; v. 2000-8 <BA01323290>

Authors:

ISBN:

9781566772730 [1566772737]

NCID:

BA59001824

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Bibliography Details

Note:	Includes bibliographical references and indexes
Language:	English

Tokyo Tech Book Review

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