Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium

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Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium / editors, M.T. Swihart, M.D. Allendorf, M. Meyyappan

Format:

Book

Published:

Pennington, N.J. : Electrochemical Society, c2001

Description:

ix, 508 p. ; 24 cm

Series:

Proceedings / [Electrochemical Society] ; v. 2001-13 <BA01323290>

Authors:

ISBN:

9781566773195 [1566773199]

NCID:

BA59006533

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Bibliography Details

Note:	Includes bibliographical references and indexes
Language:	English

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