Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium / editors, J. Ruzyllo ... [et al.]
- Format:
- Book
- Published:
- Pennington, N.J. : Electrochemical Society, c2002
- Description:
- x, 374 p. ; 24 cm
- Series:
- Proceedings / [Electrochemical Society] ; v. 2001-26 <BA01323290>
- Authors:
- ISBN:
- 9781566773591 [1566773598]
- NCID:
- BA59009371
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