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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany / editors, B.O. Kolbesen ... [et al.]

Format:
Book
Published:
Pennington, N.J. : Electrochemical Society, c2001
Description:
x, 362 p. ; 24 cm
Series:
Proceedings / [Electrochemical Society] ; v. 2001-29 <BA01323290>
Authors:
ISBN:
9781566773638 [1566773636]
NCID:
BA59030458
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