Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany / editors, B.O. Kolbesen ... [et al.]

Format:

Book

Published:

Pennington, N.J. : Electrochemical Society, c2001

Description:

x, 362 p. ; 24 cm

Series:

Proceedings / [Electrochemical Society] ; v. 2001-29 <BA01323290>

Authors:

ISBN:

9781566773638 [1566773636]

NCID:

BA59030458

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Bibliography Details

Note:	Includes bibliographic references and indexes
Language:	English

Tokyo Tech Book Review

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