Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

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Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK / Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)

Format:

Book

Published:

Bellingham, Wash. : SPIE, c2001

Description:

v, 158 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4405 <BA0022700X>

Authors:

ISBN:

9780819441065 [0819441066]

NCID:

BA59329929

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Holdings

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Bibliography Details

Note:	Includes bibliographic references and author index
Subject:	Integrated circuits--Very large scale integration--Design and construction Congresses; Microelectronics industry--Production control Congresses; Microelectronics--Materials Congresses
Language:	English

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