Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California

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Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California / Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

Format:

Book

Published:

Bellingham, Wash. : SPIE, c1999

Description:

xi, 534 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3618 <BA0022700X>

Authors:

ISBN:

9780819430885 [0819430889]

NCID:

BA60544918

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Bibliography Details

Note:	Includes bibliographical references and index
Subject:	Laser ablation Congresses; Lasers--Industrial applications Congresses; Manufacturing processes Congresses; Microelectronics industry--Equipment and supplies Congresses; Optoelectronic devices--Design and construction--Congresses
Language:	English

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