Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.

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Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. / editors, Janice L. Veteran. ... [et al.]

Format:

Book

Published:

Warrendale : Materials Research Society, c2002

Description:

xvii, 672 p. ; 24 cm

Series:

Materials Research Society symposium proceedings ; v. 715 <BA00013775>

Authors:

ISBN:

9781558996526 [1558996524]

NCID:

BA60694309

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Bibliography Details

Note:	Includes bibliographical references and indexes
Language:	English

Tokyo Tech Book Review

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