Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA

>> Google Books

QR code for holdings

Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA / Francis M. Houlihan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineer

Format:

Book

Published:

Bellingham, Wash. : SPIE, c2000

Description:

2v. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3999 <BA0022700X>

Authors:

ISBN:

9780819436177 [0819436178] (SET)

NCID:

BA60711838

Holding items in this series

Full Text

Holdings

Other editions or volumes

Bibliography Details

Note:	Includes bibliographical references and index
Language:	English

Tokyo Tech Book Review

Similar Items:

1 Book Advances in resist technology and processing XVIII : 26-28 February, 2001, Santa Clara, [California] USA (: set ; pt. 1 ; pt. 2) Houlihan, Francis M., Annual SPIE Cconference on Advances in Resist Ttechnology and Processing, Society of Photo-optical … SPIE	7 Book Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California (: set ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Conley, Will SPIE
2 Book Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California (pbk.) MacDonald, Scott A., Society of Photo-optical Instrumentation Engineers International Society for Optical Engineering	8 eBook Advances in Resist Technology and Processing XVII Houlihan SPIE Digital Library Proceedings
3 Book Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA Dobisz, Elizabeth Ann, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials … SPIE	9 Book Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Allen, Rober D. SPIE
4 Book Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California (pbk.) Bowden, M. J., 1943-, Society of Photo-optical Instrumentation Engineers SPIE	10 Book Advances in resist technology : March 12-13, 1984, Santa Clara, California (pbk.) Willson, C. G. (C. Grant), 1939-, Society of Photo-optical Instrumentation Engineers S.P.I.E.-- International Society for Optical Engineering
5 Book Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Conley, Will SPIE	11 Book Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California (pbk.) Thompson, L. F., 1944-, International Society for Hybrid Microelectronics, Society of Photo-optical Instrumentation … SPIE--the International Society for Optical Engineering
6 Book Advances in resist technology and processing XI : 28 February-1 March 1994, San Jose, California Nalamasu, Omkaram, Society of Photo-optical Instrumentation Engineers SPIE	12 Book Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California (pbk.) Willson, C. G. (C. Grant), 1939-, Society of Photo-optical Instrumentation Engineers SPIE--the International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12