Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

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Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California / James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

Format:

Book

Published:

Bellingham, Wash. : SPIE, c1999

Description:

x, 434 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3874 <BA0022700X>

Authors:

ISBN:

9780819434715 [081943471X]

NCID:

BA61055032

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Bibliography Details

Note:	Includes bibliographic references and author index
Subject:	Electromechanical devices--Design and construction Congresses; Microfabrication Congresses; Micromachining Congresses
Language:	English

Tokyo Tech Book Review

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