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Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices / editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division

Format:
Book
Published:
Pennington, N.J. : Electrochemical Society, c1999
Description:
ix, 552 p. ; 24 cm
Series:
Proceedings / [Electrochemical Society] ; v. 99-16 <BA01323290>
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3895 <BA0022700X>
Authors:
ALTECH 99 (1999 : Leuven, Belgium)
Kolbesen, Bernd O. <DA07746930>
Electrochemical Society. Electronics Division <DA0357072X>
Electrochemical Society. Meeting <DA03398898>
電気化学協会 <DA00115986>
Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices (1999 : Honolulu, Hawaii)
European Solid State Device Research Conference <DA00938219>
2 more
ISBN:
9780819434975 [0819434973] (:SPIE)
9781566772396 [1566772397] (:ECS)
NCID:
BA66924911
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