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Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France / editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics

Format:
Book
Published:
Pennington, N.J. : Electrochemical Society, c2005
Description:
viii, 190 p. ; 24 cm
Series:
Proceedings / [Electrochemical Society] ; v. 2005-10 <BA01323290>
Authors:
ISBN:
9781566774284 [1566774284]
NCID:
BA74394959
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