MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California

>> Google Books

QR code for holdings

MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California / Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.]

Format:

Book

Published:

Bellingham, Washington : SPIE, c1999

Description:

vi, 176 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3880 <BA0022700X>

Authors:

ISBN:

9780819434777 [0819434779] (pbk.)

NCID:

BA76480734

Holding items in this series

Full Text

Holdings

Other editions or volumes

Bibliography Details

ISSN:	0277786X
Note:	Includes bibliographical references and index
Subject:	Microelectromechanical systems--Reliability--Congresses
Language:	English

Tokyo Tech Book Review

Similar Items:

1 Book MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA Lawton, Russell A., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials … SPIE	7 Book Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS, Hartzell, Allyson L., Ramesham, Rajeshuni, Society … SPIE
2 Book Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA Hartzell, Allyson L., Ramesham, Rajeshuni, Society of Photo-optical Instrumentation Engineers, Boston University. … SPIE	8 Book Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California Motamedi, M. Edward, Göring, Rolf, Society of Photo-optical Instrumentation Engineers, Solid State Technology … SPIE
3 Book Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA Ramesham, Rajeshuni, Tanner, Danelle Mary, 1952-, Society of Photo-optical Instrumentation Engineers, Semiconductor … SPIE	9 Book Micromachined devices and components V : 20-21 September 1999, Santa Clara, California French, Patrick J., Peeters, Eric, Society of Photo-optical Instrumentation Engineers, Solid State Technology … SPIE
4 Book Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA Tanner, Danelle Mary, 1952-, Ramesham, Rajeshuni, Society of Photo-optical Instrumentation Engineers, Semiconductor … SPIE	10 Book Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California Society of Photo-optical Instrumentation Engineers SPIE
5 Book Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January, 2004, San Jose, California, USA Tanner, Danelle Mary, 1952-, Ramesham, Rajeshuni, Society of Photo-optical Instrumentation Engineers SPIE	11 Book Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California Smith, James H., Karam, Jean-Michel, Society of Photo-optical Instrumentation Engineers, Solid State Technology … SPIE
6 Book Reliability, packaging, testing, and characterization of MEMS/MOEMS V : 25-26 January, 2006, San Jose, California, USA Tanner, Danelle Mary, 1952-, Ramesham, Rajeshuni, Society of Photo-optical Instrumentation Engineers SPIE	12 Book Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California Motamedi, M. Edward, Herzig, Hans Peter, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and … SPIE

1

2

3

4

5

6

7

8

9

10

11

12