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MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California / Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.]

Format:
Book
Published:
Bellingham, Washington : SPIE, c1999
Description:
vi, 176 p. ; 28 cm
Series:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3880 <BA0022700X>
Authors:
ISBN:
9780819434777 [0819434779] (pbk.)
NCID:
BA76480734
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