Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain

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Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain / Carles Cané, Jung-Chih Chiao, Fernando Vidal Verdú, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

Format:

Book

Published:

Bellingham, Wash. : SPIE, c2005

Description:

xv, 730 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5836 <BA0022700X>

Authors:

Centro Nacional de Microlectrónica

Society of Photo-optical Instrumentation Engineers <DA00848546>

1 more

ISBN:

9780819458315 [0819458317] (: pbk)

NCID:

BA76514246

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Bibliography Details

Other titles:	Smart sensors, actuators, and MEMS 2
ISSN:	0277786X
Note:	Includes bibliographical references and author index
Subject:	Actuators--Industrial applications--Congresses; Detectors--Industrial applications--Congresses; Microelectromechanical systems--Congresses; Microtechnology--Congresses; Scanning systems--Congresses
Language:	English

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