Cleaning and surface conditioning technology in semiconductor device manufacturing 10

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Cleaning and surface conditioning technology in semiconductor device manufacturing 10 / editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics

Format:

Book

Published:

Pennington, NJ : Electrochemical Society, c2007

Description:

xi, 481 p. ; 24 cm. + 1 CD-ROM

Series:

ECS transactions ; vol. 11, no. 2 <BA78566502>

Authors:

ISBN:

9781566775687 [156677568X]
9781566775809 [1566775809] (: CD-ROM)

NCID:

BA84580235

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Bibliography Details

Other titles:	Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
ISSN:	19385862
Note:	"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref Includes bibliographical references and indexes Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10 "... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM
Language:	English

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