Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

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Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA / David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

Format:

Book

Published:

Bellingham, Wash., USA : SPIE, c2000

Description:

ix, 344 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4181 <BA0022700X>

Authors:

Burnett, David

Kimura, Shiníchiro

Singh, Bhanwar

Society of Photo-optical Instrumentation Engineers <DA00848546>

Solid State Technology (Organization)

Electrochemical Society <DA00164369>

American Vacuum Society <DA03926125>

2 more

ISBN:

9780819438423 [0819438421]

NCID:

BA85986858

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Bibliography Details

Note:	Includes bibliographical references and index
Subject:	Integrated optics--Congresses; Microelectronics--Congresses; Microlithography--Congresses; Optical interconnects--Congresses; Semiconductors--Congresses
Language:	English

Tokyo Tech Book Review

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