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Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA / David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

Format:
Book
Published:
Bellingham, Wash., USA : SPIE, c2000
Description:
ix, 344 p. ; 28 cm
Series:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4181 <BA0022700X>
Authors:
Burnett, David
Kimura, Shiníchiro
Singh, Bhanwar
Society of Photo-optical Instrumentation Engineers <DA00848546>
Solid State Technology (Organization)
Electrochemical Society <DA00164369>
American Vacuum Society <DA03926125>
2 more
ISBN:
9780819438423 [0819438421]
NCID:
BA85986858
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