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Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

Format:
Book
Published:
Bellingham, Wash., USA : SPIE, c1999
Description:
vii, 394 p. ; 28 cm
Series:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3892 <BA0022700X>
Authors:
Device and Process Technologies for MEMS and Microelectronics (Conference)
Chau, Kevin
Dimitrijev, Sima, 1958-
Society of Photo-optical Instrumentation Engineers <DA00848546>
Institution of Radio and Electronics Engineers, Australia <DA03821819>
Queensland. Government State Development
Griffith University Microelectronics Engineering Society
2 more
ISBN:
9780819434937 [0819434930]
NCID:
BA86012776
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