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Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas / Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Format:
Book
Published:
Bellingham, Wash., USA : SPIE, c1995
Description:
viii, 326 p. ; 28 cm
Series:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2636 <BA0022700X>
Authors:
ISBN:
9780819420022 [0819420026]
NCID:
BC06604462
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