Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

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Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California / M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Format:

Book

Published:

Bellingham, Washington : SPIE, c1998

Description:

vii, 240 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3513 <BA0022700X>

Authors:

ISBN:

9780819429728 [0819429724]

NCID:

BC07260212

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Bibliography Details

Other titles:	Microelectronic structures and MEMS for optical processing 4
Note:	Includes bibliographical references and index
Subject:	Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optoelectronics--Congresses
Language:	English

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