Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

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Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany / Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Format:

Book

Published:

Bellingham, Wash., USA : SPIE, c2001

Description:

v, 176 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4400 <BA0022700X>

Authors:

Gorecki, Christophe

Jüptner, Werner P. O. <DA04166424>

Kujawińska, Małgorzata <DA10045402>

European Optical Society <DA09002606>

Wissenschaftliche Gesellschaft Lasertechnik

Society of Photo-optical Instrumentation Engineers <DA00848546>

1 more

ISBN:

9780819440952 [0819440957] (pbk.)

NCID:

BC07734281

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Bibliography Details

Other titles:	Metrology and inspection
Note:	Includes bibliographical references and index
Subject:	Interferometry--Congresses; Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optical detectors--Industrial applications--Congresses; Quality control--Optical methods--Congresses
Language:	English

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