Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

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Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany / Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Format:

Book

Published:

Bellingham, Wash. : SPIE, c2003

Description:

ix, 210 p. ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5145 <BA0022700X>

Authors:

ISBN:

9780819450159 [0819450154]

NCID:

BC07734328

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Bibliography Details

Other titles:	Metrology and inspection Microsystems engineering : metrology and inspection 3
Note:	Includes bibliographical references and author index
Subject:	Interferometry--Congresses; Measurement--Congresses; Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optical detectors--Industrial applications--Congresses; Quality control--Optical methods--Congresses
Language:	English

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