Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA

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Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA / Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA)

Format:

Book

Published:

Bellingham, Wash. : SPIE, c2008

Description:

1 v. (various pagings) ; 28 cm

Series:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6925 <BA0022700X>

Authors:

ISBN:

9780819471109 [0819471100]

NCID:

BC16221550

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Bibliography Details

Other titles:	Design for manufacturability through design process integration 2
Note:	Includes bibliographical references and author index
Subject:	Integrated circuits--Defects--Analysis--Congresses; Integrated circuits--Design and construction--Congresses; Microelectronics industry--Quality control--Congresses; Quality control--Congresses; Semiconductor wafers--Defects--Analysis--Congresses; Semiconductors--Design and construction--Congresses
Language:	English

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