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1.

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1. Chemical Mechanical Planarization : proceedings of the International Symposium (IV ; V ; VI)
editors, R.L. Opila ... [et al.]
Published: Pennington, N.J. : Electrochemical Society, c2001-2003  3 v. ; 24 cm
Series: Proceedings / [Electrochemical Society] ; v. 2000-26, 2002-1, 2003-21
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2.

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2. Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
editors, S. Raghavan, R.L. Opila, L. Zhang ; Electronics and Dielectric Science and Technology Divisions [of the Electrochemical Society]
Published: Pennington, N. J. : Electrochemical Society, c1998  viii, 274 p. ; 23 cm
Series: Proceedings / [Electrochemical Society] ; v. 98-7
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3.

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3. Polymer/inorganic interfaces : symposium held April 14-16, 1993, San Francisco, California, U.S.A.
editors, Robert L. Opila, F. James Boerio, A.W. Czanderna
Published: Pittsburgh, Pa. : Materials Research Society, c1993  xi, 236 p. ; 24 cm
Series: Materials Research Society symposium proceedings ; v. 304
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4.

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4. High temperature corrosion and materials chemistry : proceedings of the International Symposium (III ; IV ; V)
editors, M. McNallan, E. Opila
Published: Pennington, New Jersey : Electrochemical Society, c2001-2004  3 v. ; 24 cm
Series: Proceedings / [Electrochemical Society] ; v. 2001-12, 2003-16, 2004-16
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5.

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Book
5. Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
editors, R.L. Opila ... [et al.]
Published: Pennington, N. J. : Electrochemical Society, c2000  xii, 644 p. ; 24 cm
Series: Proceedings / [Electrochemical Society] ; v. 99-37
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