Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

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Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing / editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions

Format:

Book

Published:

Pennington, NJ : Electrochemical Society, c1997

Description:

ix, 347 p. ; 23 cm

Series:

Proceedings / [Electrochemical Society] ; v. 97-9 <BA01323290>

Authors:

International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

Meyyappan, M.

Economou, D. J. (Demetre John), 1958-

Butler, S. W. (Stephanie Watts), 1963- <DA10050898>

Electrochemical Society. Dielectric Science and Technology Division <DA06421624>

Electrochemical Society. Electronics Division <DA0357072X>

Electrochemical Society. Meeting <DA03398898>

2 more

ISBN:

9781566771368 [1566771366]

NCID:

BA4312797X

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Note:	"Part of the 191st Meeting of the Electrochemical Society"--P. iii Includes bibliographical references and indexes
Subject:	Process control--Congresses; Semiconductor industry--Production control--Congresses; Semiconductors--Design and construction--Congresses
Language:	English

Tokyo Tech Book Review

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