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Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1986
形態:
xvii, 535 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 71 <BA00013775>
著者名:
ISBN:
9780931837371 [0931837375]
書誌ID:
BA03515168
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