Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1986

形態:

xvii, 535 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 71 <BA00013775>

著者名:

ISBN:

9780931837371 [0931837375]

書誌ID:

BA03515168

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographies and indexes
主題:	Microelectronics--Materials--Congresses
言語:	英語

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