Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A. | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A. / editors, James C. Sturm ... [et al.]

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1988

形態:

xvii, 524 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 107 <BA00013775>

著者名:

ISBN:

9780931837753 [0931837758]

書誌ID:

BA0514719X

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographies and indexes
主題:	Ion implantation--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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